Preparation of fluorine doped tin oxide film by ultrasonic spray. The electrical properties of fto films prepared by sol gel remain relatively lower than the. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii chloride sncl 2. Using the fto sol, fto films are prepared by ultrasonic spray pyrolysis technique. Different parameters like spray angle, source to substrate distance, spray nozzle position, spray rate, carrier gas. Some physical properties of fluorinedoped sno 2 films. The solution then proceeds to spray pyrolysis process to produce the fto substrate. Spray pyrolysis deposition spd technique has been employed to prepare large area fluorinedoped tin oxide fto, nanocrystalline tio. Effect of substrate temperature on fluorine doped tin.
Fluorine doped tin oxide fto thin films were prepared by using amm onium fluoride nh 4f and dbtda. Titanium dioxide, spray pyrolysis, doping mafiadoc. Structural and optical properties of fluorine doped tin oxide thin. Pdf gas sensing of fluorine doped tin oxide thin films. These two solutions were mixed and finally get the fluorine doped with tin oxide. Pdf structural and optical properties of fluorine doped tin oxide. The transparent conducting fto film gave low sheet resistance 8. Low temperature synthesis of fluorinedoped tin oxide transparent conducting thin film by spray pyrolysis deposition. In order to investigate the fluorine presence, we have analyzed the composition of fto film and the formed powder in the solution during film growth. Fluorinedoped tin oxide thin films deposition by solgel. The asprepared films are polycrystalline with a tetragonal crystal structure. Pdf electrical and optical properties of fluorine doped. Uvvisible spectroscopy, hall effect measurement, edx, sem and tofsims were employed to investigate the optoelectronic properties of the film.
The crystal structure of fto thin films was determined through xray diffraction xrd. Fluorine doped tin oxide fto coatings have been prepared using the midfrequency pulsed dc closed field unbalanced magnetron sputtering technique in an aro2 atmosphere using blends of tin oxide and tin fluoride powder formed into targets. Effect of fluorine doping on the electrical and optical. Fluorinedoped tin oxide fto thin films were prepared, at different substrate temperatures, using dilute precursor solutions of dinbutyltiniv diacetate 0. Influence of atomizing voltage on fluorine doped tin oxide. Electronic and optical properties of fluorinedoped tin. Preparation and characterization of transparent conductive sno2. Fluorodoped tin oxide was reported to behave as ntype semiconductor with wide band gap within 3. Mohamed, fabrication of fluorine doped tin oxide fto thin films using spray pyrolysis deposition method for transparent conducting oxide, arpn journal of engineering and applied sciences jeas, vol. Fluorine doped tin oxide fto is a possible alternative to ito because fto is inexpensive as well as chemically and thermally stable kim et al. Structural, optical and electrical properties of fluorine. Fluorine doped tin oxide fto thin films were prepared at different deposition temperatures using the spray pyrolysis deposition spd technique.
Spray pyrolysis technique has been used to deposit fluorine doped tin oxide fto thin films. Low temperature synthesis of fluorinedoped tin oxide. Sno 2 films were prepared by spray pyrolysis technique on glass substrates. Spray pyrolysis deposition spd technique has been employed to prepare large area fluorine doped tin oxide fto, nanocrystalline tio. Paper open access related content preliminary study in. It was observed that the conductivity of the fto thin film increased with. Fto coatings were deposited with a thickness of 400 nm on glass substrates. The fluorinedoped tin oxide thin films were prepared using a modified respiratory. In the present work, undoped sno2 and fluorinedoped tin oxide fto thin films were prepared by solgel process using a solution composed of sncl2, h2o, nh4f, and ethanol mixture.
Thin films of undoped and fluorinedoped tin oxide have been prepared on fused silica substrates by a spray pyrolysis technique. They are an important component in a number of electronic devices including liquidcrystal displays, oleds, touchscreens and photovoltaics. Physicochemical characteristics of fluorine doped tin. Fluorinedoped tin oxide films by spray pyrolysis using vacuum within nozzle the water molecules provide oxygen, however the oxygen concentration is affected by the rate of cooling of the films after the spray due to the adsorption of oxygen. The synthesis of fluorine doped tin oxide has been conducted under spray pyrolysis technique in which a precursor solution of sncl2. The substrate temperature was set to 200 o c, 150 o c and 100 o c for different samples. Transparent conducting films tcfs are thin films of optically transparent and electrically conductive material.
Improvement of transparent conducting performance on. Structural studies of the films were undertaken by xray diffraction xrd. The effects of fluorine doping rate sno 2 films properties are studied. The purpose of this research is aimed at finding an optimum. Undoped, antimony doped and fluorine doped tin oxide films have been prepared by spray pyrolysis technique. Tin oxide thin films doped with fluorine, antimony and both have been prepared by spray pyrolysis from sncl precursor. The spray nozzle tosubstrate distance was set to about 15 cm. Undoped and nitrogendoped titanium dioxide tio2 thin films of 400 nm thick deposited by spray pyrolysis were structurally and optically characterized. Temperature dependence of fluorinedoped tin oxide films. Physical properties of highly oriented spray deposited. Transparent and conductive fluorine doped tin oxide thin films fto were deposited on to thoroughly cleaned glass substrates by nebulized spray pyrolysis technique using dihydrated tin ii. Growth and properties of fluorinedoped tin oxide films.
Pdf pfluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. The oxygen deficiency and dopant presence into films increase the electric conductivity of them. Sno2 films have been prepared onto the amorphous glass substrates by a spray pyrolysis. Fluorinedoped tin oxide fto films were prepared at different substrate temperatures by ultrasonic spray pyrolysis technique on glass substrates. Xray diffraction xrd spectrum showed all the peaks of the crystalline sno 2. Fluorine doped tin oxide fto thin films were prepared by using ammonium fluoride nh4f and dbtda. The fluorine concentration in the precursor solution was varied from 0 to 40 at.
Preparation of fluorine doped tin oxide film by ultrasonic. The technique of solgel combined with ultrasonic spray pyrolysis gives the possibility to produce highquality largescale fto films. Spray pyrolysis on fluorine doped tin oxide fto coated glass slides nitrogen as the carrier gas. No postdeposition annealing treatments were carried out. Xrd studies reveal that the material deposited is polycrystalline sno2 and. It can be used for lowe glasses, thin film solar cells, displays, etc. Fluorine doped tin oxide fto thin films were deposited on glass substrates by home built spray pyrolysis setup at 400 5. Performance of transparent conducting fluorinedoped tin.
Among fdoped tin oxide films, the lowest resistivitiy was found to be 6. Syntheses and characterization of fluorine doped tin oxide. Films with the lowest electrical resistivity were deposited using an aqueous solution of zinc acetate at 490 c resulting in improved crystallinity, while. Preparation of fluorine doped tin oxide by a spray. The fluorine concentration effect on structural, optical and electrical properties of sno2 films is investigated. Thin films of fluorinedoped sno 2 have been prepared by deposition on borosilicate glass using the spraypyrolysis technique. Ethanol sensing properties of f doped zno thin films by.
Preliminary study in fabricating fluorinedoped tin oxide by using spray pyrolysis methods to cite this article. Fluorine doped tin oxide fto thin films were prepared by chemical spray pyrolysis method on glass substrates for different substrate temperatures and their structural, optical and electrical studies were investigated. Effects of fsn atomic ratios on structuralmorphological, compositional, electrical, optical, and nanomechanical properties of the fto thin films were. Thin film deposition using spray pyrolysis 105 properties of zinc oxide. Synthesis and characterization of pure and fluorine doped. Thin films of tin oxide sno 2 and fluorine doped tin oxide sno 2. Nanomechanical and material properties of fluorinedoped. For this purpose, undoped and fluorinedoped tinoxide sno 2 thin films were prepared by solgel dip coating process. The solution was sprayed on the heated glass substrate using km 150 spray pyrolysis deposition machine. During the deposition, the films were deposited at a constant temperature and. Dopants used were antimony tri chloride sbcl 3 for antimony doped tin oxide ato films, and ammonium fluoride nh 4 f for. Fabrication and characterization of spraydeposited. Among the commercially common transparent conducting oxides tcos are fluorinedoped tin oxide fto and indiumdoped tin oxide ito, neither of which meets all criteria for the optimal tco.
Optical properties of these films are investigated in the entire uv. Optical characterization of fluorine doped tin oxide fto. The prime aim of this work is to fabricate fluorine doped tin oxide thin film using a low cost manually controlled homemade spray pyrolysis system and investigate its structural, optical and electrical properties. Our previous work on undoped spray deposited sno 2 films showed that precursor concentration is the most important process parameter controlling growth rate and structural properties, which. International journal of energy engineering 2012, 23. Fluorine doped tin oxide films from spray pyrolysis of. Fluorinedoped tin oxide films by spray pyrolysis using. Fabrication of fluorine doped tin oxide fto thin filmsusing spray pyrolysis deposition methodfor transparent conducting oxide. Tco glasses, fluorinedoped tin oxide fto has the biggest potential to be developed. Structural and electrical studies on highly conducting. Fluorine doped tin oxide fto film is one of the most promising transparent conducting materials.
The refractive index,n, showed a considerable decrease 2. Hegazy et almodification of fluorinedoped tin oxide surface. Preparation of fluoridedoped tin oxide films on sodalime. Pdf fabrication of fluorine doped tin oxide fto thin filmsusing. Structural, optical and electrical properties were studied. F fto were prepared by sol gel dip coating sgdc route method by using easily available low cost materials as we use sncl 2, 2h 2o and hf. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range. Fluorine doping increased the degree of crystallinity and preferred orientation as well as the figure of merit 23.
Nanomechanical and material properties of fluorinedoped tin. The spray pyrolysis technique was employed to deposit the fluorine doped tin oxide thin films. Optical constants such as refractive index n, extinction coefficient k and the absorption coefficient of the fto thin films were determined using spectrophotometric measurement of transmittance, absorbance and reflectance in the spectral range from 172 to 1100nm. Syntheses and characterization of fluorine doped tin oxide using spray pyrolysis technique. Motohiro, lowtemperature growth of highly crystallized transparent conductive fluorinedoped tin oxide films by intermittent spray pyrolysis deposition. The precursor solution was the mixture tin chloride pentahydrate solution and ammonium fluoride solution. In this study, highly transparent conducting fluorinedoped tin oxide fto electrodes were fabricated using the horizontal ultrasonic spray pyrolysis deposition. The effect of doping on the concentration and mobility of the charge carriers electrons as well as the resistivity of the films has been studied. Developed spray pyrolysis reactor for fabricating fluorinedoped tin.
While indium tin oxide ito is the most widely used, alternatives include widerspectrum transparent conductive oxides tcos, conductive. Pdf fabrication of fluorine doped tin oxide fto thin. A systematic optimization of the solvent and the precursor as well as the preparation parameters and their effect on structural and physical electricaloptical characteristics are. Fluorinedoped tin oxide fto thin films were deposited on glass substrates using ultrasonic spray pyrolysis usp at a fixed. Despite its superior chemical stability and being composed of abundant elements, fto suffers from high surface roughness compared to ito. Mcelnea department of chemistry, the university of queensland, brisbane 4072, australia received 12 december 1994. The films grown at the optimum substrate temperature with different doping levels have been chosen for this study. Electrical and optical properties of fluorine doped tin oxide. Pdf preparation of fluorine doped tin oxide film by.
The inset in b is a schematic of the ultrasonic spray pyrolysis usp system. The effect of substrate heating temperature upon spray pyrolysis. Investigations on the optical properties of undoped. Structural and optical characterization of nitrogendoped. Pdf optimization of fabricating fluorinedoped tin oxide. This works is fo cused on producing high transparency materials above. Optical and electrical properties of fluorine doped tin. The use of these fto plates in dyesensitized solar. Optoelectronic properties of fluorine doped tin oxide.